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Address
Lambda Scientific Pty Ltd
2/147 Buxton Street, North Adelaide,
SA 5006 Australia

Tel. +61 8 8267-2686
Fax. +61 8 8267-2689
Email: sales@lambdasci.com

 
 

 

 
      
LIMF-10
Optical Thin-Film Measurement System
     
LIMF-10
    
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Features   
Fast Measurement
Multi-layers
User friendly    
Flexibility 
image Cost effective
          
Introduction

Thin films are widely used in a variety of applications and the Thin-Film Measurement System can easily determine their properties. Based on interference spectral analysis of multi-reflection beams, this instrument functions non-contact optical measurement of thickness, refractive index, and extinction coefficient of various thin films and coatings.
With dedicated hardware design and program development, this measurement system is easy to setup and the software is user friendly. It is suitable for both on-line manufacturing and desktop measuring.
With the ability to connect to your microscope to reduce the spot size or to dismantle for solely spectroscopic use, the Thin-Film Measurement System really is your solution to your measurement problems.

                  
Specifications   

Measurement Range

Thickness only

20nm to 50µm

Thickness with n and k
100nm to 10µm
Wavelength Range 360nm to 1000nm
Accuracy The greater of ±1nm or ±0.5%
Precision 0.2nm
Repeatability 0.1nm
Spot size Adjustable 0.8mm to 1cm (10µm with a microscope)
Sample size From 1mm and up
Layers Up to 4 layers
Detector type 2048-element linear silicon CCD array

Light source

Tungsten Halogen

  
Some examples of materials 

Thin film layers

Photoresist Polysilicon Polyimide Amorphous Silicon Polymer Film
Substrate material

Quartz

Aluminium Polycarbonate

Sapphire

Germanium Acrylic
 
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