Measurement Range |
Thickness only |
20nm to 50µm |
Thickness with n and k |
100nm to 10µm |
| Wavelength Range |
360nm to 1000nm |
| Accuracy |
The greater of
±1nm or
±0.5% |
| Precision |
0.2nm |
| Repeatability |
0.1nm |
| Spot size |
Adjustable 0.8mm to 1cm (10µm with a microscope) |
| Sample size |
From 1mm and up |
| Layers |
Up to 4 layers |
| Detector type |
2048-element linear silicon CCD array |
Light source |
Tungsten Halogen |